High-quality microresonators in the longwave infrared based on native germanium statuses NatureComms
After the mechanical lapping and polishing process, which utilized adhesive lapping to minimize scratch formation, electron beam lithography was used to define the features of the Ge, using a Vistec EBPG5200 EBL System at 100 KV. HMDS adhesion promoter and Espacer-300Z discharger were applied before and after the spin-coating of the e-beam resist MA-N-2403. This step is essential.
The curved Ge waveguides were fabricated using the same process in order to efficiently couple the light from free space into the microresonator. The Ge waveguide has a larger in-plane end facet to enhance the collection of the light from the free space. Both the coupling sections of the Ge microresonator and the waveguide were diced to the edge of the glass chips .
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